Photo Lithography Process Tools 

MSX3000 (Lithography & Wet Process Tools)

  • Automated system up to 300mm
  • Spin Coating
  • Spin Developing
  • Baking
  • Spin Flux Cleaner
  • SECS/GEM
  • Dimensions (mm) : 2300(W) X 3000(D) X 1950(H)
  • Provide customized spec     

MSX 1000

  • Automated system up to 300mm
  • Spin Coating
  • Spin Developing
  • Baking
  • Spin Flux Cleaner
  • SECS/GEM
  • Dimensions (mm) : 2300(W) X 3000(D) X 1950(H)
  • Provide customized spec

MSX 2000

  • Automated system up to 300mm
  • Spin Coating
  • Spin Developing
  • Baking
  • Spin Flux Cleaner
  • SECS/GEM
  • Dimensions (mm) : 2300(W) X 3000(D) X 1950(H)
  • Provide customized spec

Wet Process Tools 

Metal Lift-Off Neo

  • Automated system up to 200mm
  • Spin Lift-Off, P.R Stripper, P.R Cleaner
  • Soaking
  • SECS/GEM
  • Dimensions (mm) : 2090(W) X 3220(D) X 2200(H)
  • Provide customized spec

SSP 200 (Wet Process & Other Tools) 

  • Manual system up to 300mm
  • Spin Etcher
  • Semi Automated system up to 200mm
  • Spin Coating & Vacuum Chamber Dry
  • SECS/GEM
  • Dimensions (mm) : 1580(W) X 1370(D) X 2400(H)
  • Provide customized spec


Electro Plating Process Tools 

JIKJI-77

  • Automated system up to 300mm
  • Material : Cu, Ni, Sn, SnAg, SnAu
  • eG1 / eG2 / Pre-Wet / CG / Act / Anneal / AuSn
  • SECS/GEM
  • Dimensions (mm) : 2016(W) X 5222(D) X 2605(H)
  • Provide customized spec

TSV Single System 

  • Manual system up to 300mm
  • Material : Cu, Ni, Sn, SnAg, SnAu
  • eG1 / eG2 / Pre-Wet / CG / Act / Anneal / AuSn
  • SECS/GEM
  • Dimensions (mm) : 1160(W) X 745(D) X 1800(H)
  • Provide customized spec

Single Plating 

  • Manual system up to 300mm
  • Material : Cu, Ni, Sn, SnAg, SnAu
  • SECS/GEM
  • Dimensions (mm) : 1160(W) X 745(D) X 1800(H)
  • Provide customized spec

Other Tools 

SSP 300

  • Automated system up to 200mm Ring frame
  • Spin Protective Coating
  • SECS/GEM
  • Dimensions (mm) : 1600(W) X 1143(D) X 2000(H)
  • Provide customized spec

TLX 500

  • Automated system up to 370mm X 470mm
  • Spin Coating
  • Spin Developing
  • Baking
  • SECS/GEM
  • Dimensions (mm) : 4190(W) X 3500(D) X 2000(H)
  • Provide customized spec