Service
Used Equipment
Refurbishment
Parts
Customized Request
Cleanroom & Equipment Requirement Planning & Support (2" ~ 8" )
Used Equipment
- Nikon Stepper：G6／G7／i7／i8／i9／i10／i11
- Canon Stepper : i4 / i5 / i5+
- TEL Track：MK-VZ／MK-7／MK-8
- Hitachi CDSEM：S88xx／S92xx
- CND Plus Coater/Developer
- ASSI Spin Rinse Dryer
Refurbishment
- AE & MAE & MKS RPS (Remote Plasma Source)
- AMAT EPD (Verity Eye D) Controller, Model : SD1024D-2-S / SD2048DL
- DAIHEN & MKS Magnetron Head
- Turbo pump & Dry pump & TES Robot / Controller
- NSK & KollMorgen Motor / Driver
Parts
- Diffuser / Bulk Filter / Gas Filter / Gasket Filter OEM
- SiC / Quartz / Ceramic / Glass / Aluminum related tray, fork, carrier⋯⋯
- Equipment parts ( e.g.: Motor, valve, Sensor, PCB, Driver, Power supply... )
- Mercury Lamp for Lithus / Lithus Pro / Lithus Pro V / Lithus Pro Z / ACT-8 / ACT-12 / MK8
- Mercury Lamp for Ultratech AT-300W / KLA-2367 / Nano 8000 & 9100 / DNS SK2000 & RF3S
- Customized Mercury Lamp
- TC Wafer and Thermocouple
- KALREZ O-ring for TEL & DNS 300mm furnace