The company is specialized in laser lithography equipment since 2004, starting with the development and production of mastering equipment for the optical media industry. Based on experience gained in the optical media industry 4PICO Litho developed the PicoMaster range to fill the gap between costly e-beam systems and low resolution mask aligners. The experts in our multidisciplinary team have installed over 70 mastering systems worldwide.

In 2021 4PICO Litho merges it's long-standing expertise in UV laser technology for micropatterning with Raith's leadership in nanofabrication markets and has now been officially renamed Raith Laser Systems B.V. Combining 4PICO Litho's strengths with Raith's competences in sales, marketing, production and services makes the range of PicoMaster systems top choice for customers in need of advanced micro-fabrication equipment.

4PICO Litho / Raith Laser Systems B.V. is a flexible company. Specials is what we do best. The company has access to high tech suppliers in the Eindhoven Brainport region. This region is a perfect ecosystem for innovations. All developments are done in-house.

Brief

Direct laser writing system for up to 4" x 4" substrates. This table-top system is a versatile UV laser writer with ultra-high precision components. The user-friendly MicroMaster provides unprecedented finesse in creating 2.5D micro structures as small as 800 nm in photosensitive layers.

The compact system requires minimum cleanroom space. The massive base frame supported by isolation mounts filter out ground frequencies to ensure minimum vibrations in the system. An air-conditioning unit can be included and connected to the built-in HEPA-filter which allows for a clean cross-flow and ensures optimal system performance

Key Features

Wafer thickness 0-10 mm
Market conform 0.8 µm resolution, optional 1.5 µm and 2.5 µm FWHM
Long life 405 nm diode laser
375 nm source available for i-Line resists
Automatic switching between 3 write modes
4095 grayscale levels
<0.5 µm final alignment accuracy

Brief

Industrial direct laser writer for up to 8" x 8" substrates. The PicoMaster 200 is the most versatile system in its range and ideal for multiple purposes and large projects. Due to its compact stand-alone design the system requires minimum clean-room space and allows for quick and easy installation.

The system has an integrated touchscreen controller and can be extended with an auto-loader and coating line to optimize machine utilization. The base frame is equipped with isolation mounts that filter out ground frequencies to ensure minimum vibrations in the system. An air-conditioning unit can be included and connected to the built-in HEPA-filter which allows for a clean cross-flow and ensures optimal system performance.

PicoMaster 200 has an integrated vacuum chuck and control PC. Both the scan and step axis incorporate high precision air bearings, resulting in extreme low mechanical errors and fast scan movement. The standard 300nm resolution provided by the 405nm write laser can be lowered fully automated by using the integrated numerical aperture switch. For more demanding applications a 375 nm write laser is optional.