WELL U Electronic Co., Ltd
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Repair Service & Parts

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  • Repair Service & Parts

*  Used Equipment refurbishment & Relocation:

  • Nikon Stepper:G6/G7/i7/i8/i9/i10/i11
  • Canon Stepper : i4 / i5 / i5+
  • TEL Track:MK-VZ/MK-7/MK-8
  • Hitachi CDSEM:S88xx/S92xx
  • CND Plus Coater/Developer
  • ASSI Spin Rinse Dryer


*  Parts:

  • Diffuser / Bulk Filter / Gas Filter / Gasket Filter OEM
  • SiC / Quartz / Ceramic / Glass / Aluminum related tray, fork, carrier⋯⋯
  • Equipment parts ( e.g.: Motor, valve, Sensor, PCB, Driver, Power supply... )
  • Mercury Lamp for Lithus / Lithus Pro / Lithus Pro V / Lithus Pro Z / ACT-8 / ACT-12 / MK8
  • Mercury Lamp for Ultratech AT-300W / KLA-2367 / Nano 8000 & 9100 / DNS SK2000 & RF3S 
  • Customized Mercury Lamp
  • TC Wafer and Thermocouple
  • KALREZ O-ring for TEL & DNS 300mm furnace
 

*  Repair:

  • AE & MAE & MKS RPS (Remote Plasma Source)
  • AMAT EPD (Verity Eye D) Controller, Model : SD1024D-2-S / SD2048DL
  • DAIHEN & MKS Magnetron Head
  • Turbo pump & Dry pump & TES Robot / Controller 
  • NSK & KollMorgen Motor / Driver
 
WELL U Electronic Co., Ltd
TEL:+886-3-667-2280 | FAX:+886-3-667-2210
E-mail:dancal@wellu.com.tw
Address:1F, No.29, Sec. 1, Fuxing 3rd Rd., Zhubei City, Hsinchu County 30271, Taiwan (R.O.C.)

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